Application of peristaltic pumps in chip coating, developing, and etching

2023-04-18 16:43:07

Chip production is an extremely complex process of turning sand into gold—from sand to wafers and then to chips.

The wafer is first extracted layer by layer from the sand, involving processes such as crystal pulling and slicing. Then, circuits and electronic components are fabricated on the prepared wafer, which is the most critical step in chip manufacturing. This mainly includes processes such as coating, photolithography, development, etching, and ion implantation. After hundreds of complex processes and several months of processing, kilometers-long wires and hundreds of millions of transistor devices can be integrated into a space the size of a fingernail. Packaging and testing belong to the back-end sector of the integrated circuit industry chain.

Peristaltic pumps, aimed at key chip manufacturing processes such as chip coating, development, and etching, can provide a precise product combination for delivering important process chemicals.

Application Value

· Pumped medium: acidic or alkaline reagents

· Flow rate: tens of milliliters per minute

· Flow accuracy: ±2%

· Pumped liquid range: tens to several hundred milliliters (related to coating thickness)

· Good coating uniformity, dense film layer

· Process flow: The peristaltic pump delivers acidic or alkaline solutions to adjust the pH balance, then pumps the adjusted reagent to the spray nozzle. The reagent is atomized and evenly sprayed onto the chip surface for coating, and the coating thickness determines the volume of liquid sprayed.

Recommended Model

BT101F series with imported tubing

Product Recommendation >

GXA100/WX10 - T10

Technical Specifications Channels 10; The master controller can control up to 32 channels, which can be set with individual parameters
View Details
Viton Pure fluororubber peri

Black opaque; Masterflex Viton fluoroelastomer tubing, resistant to ozone, weathering, corrosive chemicals, oils, fuels, solvents, and most mineral acids;Opera
View Details
Chemical Lined coating doubl

TYGON® Chemical peristaltic pump tubing, as a high-performance co-extruded product, uses a special formulation that combines chemical resistance and pump t
View Details
A-60-G Industrial-grade peri

TYGON® A-60-G significantly outperforms neoprene hoses, EPDM hoses, and other general-purpose hoses in repeated testing and applications.Even when exposed
View Details